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Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope
Mehta, Dalip Singh, Sugai, Masaya, Hinosugi, Hideki, Saito, Shohei, Takeda, Mitsuo, Kurokawa, Takashi, Takahashi, Hideki, Ando, Masahito, Shishido, Masataka, Yoshizawa, TetsuoVolume:
41
Year:
2002
Language:
english
Journal:
ao/41/19/ao-41-19-3874.pdf
DOI:
10.1364/AO.41.003874
File:
PDF, 3.09 MB
english, 2002