Measurement of Thermally Induced Vibrations of Microelectronic Devices by Use of a Heterodyne Electronic Speckle Pattern Interferometry Imaging Technique
Grauby, Stéphane, Dilhaire, Stefan, Jorez, Sébastien, Lopez, Luis David Patino, Rampnoux, Jean-Michel, Claeys, WilfridVolume:
42
Year:
2003
Language:
english
Journal:
ao/42/10/ao-42-10-1763.pdf
DOI:
10.1364/AO.42.001763
File:
PDF, 742 KB
english, 2003