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Wave-Front Correction Methods for Extreme-Ultraviolet Multilayer Reflectors
Singh, Mandeep, Bal, Matthieu F., Braat, Joseph J. M., Joyeux, Denis, Dinger, UdoVolume:
42
Year:
2003
Language:
english
Journal:
ao/42/10/ao-42-10-1847.pdf
DOI:
10.1364/AO.42.001847
File:
PDF, 333 KB
english, 2003