Optical Measurement of Depth and Duty Cycle for Binary...

Applied Optics 2003 Vol. 42; Iss. 16

Optical Measurement of Depth and Duty Cycle for Binary Diffraction Gratings with Subwavelength Features

Marciante, John R., Farmiga, Nestor O., Hirsh, Jeffrey I., Evans, Michelle S., Ta, Hieu T.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
42
Year:
2003
Language:
english
Journal:
ao/42/16/ao-42-16-3234.pdf
DOI:
10.1364/AO.42.003234
File:
PDF, 2.73 MB
english, 2003
Conversion to is in progress
Conversion to is failed