Step-Height Measurement by Means of a Dual-Frequency...

Applied Optics 2004 Vol. 43; Iss. 7

Step-Height Measurement by Means of a Dual-Frequency Interferometric Confocal Microscope

Lin, Dejiao, Liu, Zhongyao, Zhang, Rui, Yan, Juqun, Yin, Chunyong, Xu, Yi
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Volume:
43
Year:
2004
Language:
english
Journal:
ao/43/7/ao-43-7-1472.pdf
DOI:
10.1364/AO.43.001472
File:
PDF, 145 KB
english, 2004
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