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Optical-Gradient Antireflective Coatings for 157-nm Optical Lithography Applications
Chen, Hsuen-Li, Fan, Wonder, Wang, Tzyy-Jyann, Ko, Fu-Hsiung, Zhai, Run-Sheng, Hsu, Chien-Kui, Chuang, Tung-JungVolume:
43
Year:
2004
Language:
english
Journal:
ao/43/10/ao-43-10-2141.pdf
DOI:
10.1364/AO.43.002141
File:
PDF, 196 KB
english, 2004