Deposition and Characterization of Silica-Based Films by...

Applied Optics 2004 Vol. 43; Iss. 14

Deposition and Characterization of Silica-Based Films by Helicon-Activated Reactive Evaporation Applied to Optical Waveguide Fabrication

Bulla, Douglas A. P., Li, Wei-Tang, Charles, Christine, Boswell, Rod, Ankiewicz, Adrian, Love, John
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Volume:
43
Year:
2004
Language:
english
Journal:
ao/43/14/ao-43-14-2978.pdf
DOI:
10.1364/AO.43.002978
File:
PDF, 322 KB
english, 2004
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