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Interferometric Analysis of Nanostructured Surface Profiles: Correcting Material-Dependent Phase Shifts
Yatsenko, Leonid P., Loeffler, Matthias, Shore, Bruce W., Bergmann, KlaasVolume:
43
Year:
2004
Language:
english
Journal:
ao/43/16/ao-43-16-3241.pdf
DOI:
10.1364/AO.43.003241
File:
PDF, 810 KB
english, 2004