Measurement of duty cycles of photoresist grating masks...

Applied Optics 2005 Vol. 44; Iss. 21

Measurement of duty cycles of photoresist grating masks made on top of multilayer dielectric stacks

Li, Lifeng, Zeng, Lijiang
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Volume:
44
Year:
2005
Language:
english
Journal:
ao/44/21/ao-44-21-4494.pdf
DOI:
10.1364/AO.44.004494
File:
PDF, 328 KB
english, 2005
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