![](/img/cover-not-exists.png)
Rapid subsurface detection of nanoscale defects in live microprocessors by functional infrared emission spectral microscopy
Saloma, Caesar, Tarun, Alvarado, Bailon, Michelle, Soriano, MaricorVolume:
44
Year:
2005
Language:
english
Journal:
ao/44/34/ao-44-34-7302.pdf
DOI:
10.1364/AO.44.007302
File:
PDF, 460 KB
english, 2005