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Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality
Deumié, Carole, Gilbert, Oliver, Georges, Gaelle, Arnaud, Laurent, Amra, ClaudeVolume:
45
Year:
2006
Language:
english
Journal:
ao/45/7/ao-45-7-1640.pdf
DOI:
10.1364/AO.45.001640
File:
PDF, 1.30 MB
english, 2006