Lithographic characterization of the spherical error in an extreme-ultraviolet optic by use of a programmable pupil-fill illuminator
Naulleau, Patrick P., Cain, Jason P., Goldberg, Kenneth A.Volume:
45
Year:
2006
Language:
english
Journal:
ao/45/9/ao-45-9-1957.pdf
DOI:
10.1364/AO.45.001957
File:
PDF, 335 KB
english, 2006