Application of Mueller polarimetry in conical diffraction...

Applied Optics 2006 Vol. 45; Iss. 16

Application of Mueller polarimetry in conical diffraction for critical dimension measurements in microelectronics

Novikova, Tatiana, De Martino, Antonello, Hatit, Sami Ben, Drévillon, Bernard
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Volume:
45
Year:
2006
Language:
english
Journal:
ao/45/16/ao-45-16-3688.pdf
DOI:
10.1364/AO.45.003688
File:
PDF, 1.98 MB
english, 2006
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