State estimation approach for determining composition and...

Applied Optics 2006 Vol. 45; Iss. 27

State estimation approach for determining composition and growth rate of Si1-xGex chemical vapor deposition utilizing real-time ellipsometric measurements

Middlebrooks, Scott A., Rawlings, James B.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
45
Year:
2006
Language:
english
Journal:
ao/45/27/ao-45-27-7043.pdf
DOI:
10.1364/AO.45.007043
File:
PDF, 297 KB
english, 2006
Conversion to is in progress
Conversion to is failed