Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching
Bado, Philippe, Beholz, Lars Guenter, Sikorski, Yuri, Rablau, Corneliu, Dugan, Mark, Said, Ali A.Volume:
45
Year:
2006
Language:
english
Journal:
ao/45/28/ao-45-28-7519.pdf
DOI:
10.1364/AO.45.007519
File:
PDF, 1.07 MB
english, 2006