Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers
Ezoe, Yuichiro, Koshiishi, Masaki, Mita, Makoto, Mitsuda, Kazuhisa, Hoshino, Akio, Ishisaki, Yoshitaka, Yang, Zhen, Takano, Takayuki, Maeda, RyutaroVolume:
45
Year:
2006
Language:
english
Journal:
ao/45/35/ao-45-35-8932.pdf
DOI:
10.1364/AO.45.008932
File:
PDF, 1.19 MB
english, 2006