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Phase shifting Fizeau interferometry of front and back surfaces of optical flats
Heil, Joachim, Bauer, Tobias, Schmax, Stefan, Sure, Thomas, Wesner, JoachimVolume:
46
Year:
2007
Language:
english
Journal:
ao/46/22/ao-46-22-5282.pdf
DOI:
10.1364/AO.46.005282
File:
PDF, 2.00 MB
english, 2007