Depth profiling of ion implanted materials with skewed doping distributions using Fourier transform infrared spectroscopy
Katsidis, Charalambos C.Volume:
47
Year:
2008
Language:
english
Journal:
ao/47/2/ao-47-2-213.pdf
DOI:
10.1364/AO.47.000213
File:
PDF, 1.56 MB
english, 2008