Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography
Suman, Michele, Pelizzo, Maria-Guglielmina, Nicolosi, Piergiorgio, Windt, David L.Volume:
47
Year:
2008
Language:
english
Journal:
ao/47/16/ao-47-16-2906.pdf
DOI:
10.1364/AO.47.002906
File:
PDF, 2.77 MB
english, 2008