Extreme-ultraviolet-induced oxidation of Mo/Si multilayers

Applied Optics 2008 Vol. 47; Iss. 19

Extreme-ultraviolet-induced oxidation of Mo/Si multilayers

Benoit, Nicolas, Schröder, Sven, Yulin, Sergiy, Feigl, Torsten, Duparré, Angela, Kaiser, Norbert, Tünnermann, Andreas
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Volume:
47
Year:
2008
Language:
english
Journal:
ao/47/19/ao-47-19-3455.pdf
DOI:
10.1364/AO.47.003455
File:
PDF, 10.77 MB
english, 2008
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