Determining thickness of films on a curved substrate by use...

Applied Optics 2009 Vol. 48; Iss. 17

Determining thickness of films on a curved substrate by use of ellipsometric measurements

Han, Chien-Yuan, Lee, Zhen-You, Chao, Yu-Faye
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Volume:
48
Year:
2009
Language:
english
Journal:
ao/48/17/ao-48-17-3139.pdf
DOI:
10.1364/AO.48.003139
File:
PDF, 621 KB
english, 2009
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