Spectroscopic ellipsometry analysis of silicon nanotips...

Applied Optics 2009 Vol. 48; Iss. 26

Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching

Mendoza-Galván, Arturo, Järrendahl, Kenneth, Arwin, Hans, Huang, Yi-Fan, Chen, Li-Chyong, Chen, Kuei-Hsien
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Volume:
48
Year:
2009
Language:
english
Journal:
ao/48/26/ao-48-26-4996.pdf
DOI:
10.1364/AO.48.004996
File:
PDF, 934 KB
english, 2009
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