Application of Fresnel diffraction from a phase step to the measurement of film thickness
Taghi Tavassoly, Mohammad, Moaddel Haghighi, Iman, Hassani, KhosrowVolume:
48
Year:
2009
Language:
english
Journal:
ao/48/29/ao-48-29-5497.pdf
DOI:
10.1364/AO.48.005497
File:
PDF, 517 KB
english, 2009