Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances
Talneau, Anne, Lemarchand, Fabien, Fehrembach, Anne-Laure, Sentenac, AnneVolume:
49
Year:
2010
Language:
english
Journal:
ao/49/4/ao-49-4-658.pdf
DOI:
10.1364/AO.49.000658
File:
PDF, 458 KB
english, 2010