Evaluation of the soft x-ray reflectivity of micropore...

Applied Optics 2010 Vol. 49; Iss. 6

Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers

Mitsuishi, Ikuyuki, Ezoe, Yuichiro, Koshiishi, Masaki, Mita, Makoto, Maeda, Yoshitomo, Yamasaki, Noriko Y., Mitsuda, Kazuhisa, Shirata, Takayuki, Hayashi, Takayuki, Takano, Takayuki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
49
Year:
2010
Language:
english
Journal:
ao/49/6/ao-49-6-1007.pdf
DOI:
10.1364/AO.49.001007
File:
PDF, 500 KB
english, 2010
Conversion to is in progress
Conversion to is failed