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Moiré-based focusing and leveling scheme for optical projection lithography
Yan, Wei, Yang, Yong, Chen, Wangfu, Hu, Song, Zhou, ShaolinVolume:
49
Year:
2010
Language:
english
Journal:
ao/49/31/ao-49-31-5959.pdf
DOI:
10.1364/AO.49.005959
File:
PDF, 501 KB
english, 2010