Freeform lens arrays for off-axis illumination in an...

Applied Optics 2011 Vol. 50; Iss. 5

Freeform lens arrays for off-axis illumination in an optical lithography system

Wu, Rengmao, Li, Haifeng, Zheng, Zhenrong, Liu, Xu
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Volume:
50
Year:
2011
Language:
english
Journal:
ao/50/5/ao-50-5-725.pdf
DOI:
10.1364/AO.50.000725
File:
PDF, 717 KB
english, 2011
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