Discontinuous surface measurement by wavelength-tuning...

Applied Optics 2011 Vol. 50; Iss. 6

Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity

Hibino, Kenichi, Tani, Yosuke, Bitou, Youichi, Takatsuji, Toshiyuki, Warisawa, Shinichi, Mitsuishi, Mamoru
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Volume:
50
Year:
2011
Language:
english
Journal:
ao/50/6/ao-50-6-962.pdf
DOI:
10.1364/AO.50.000962
File:
PDF, 667 KB
english, 2011
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