Effects of substrate temperatures on the structure and properties of hafnium dioxide films
Jiao, Hongfei, Cheng, Xinbin, Lu, Jiangtao, Bao, Ganghua, Liu, Yongli, Ma, Bin, He, Pengfei, Wang, ZhanshanVolume:
50
Year:
2011
Language:
english
Pages:
1
Journal:
ao/50/9/ao-50-9-C309.pdf
DOI:
10.1364/AO.50.00C309
File:
PDF, 1.10 MB
english, 2011