Optimization of coating uniformity in an ion beam...

Applied Optics 2011 Vol. 50; Iss. 9

Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method

Gross, Mark, Dligatch, Svetlana, Chtanov, Anatoli
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Volume:
50
Year:
2011
Language:
english
Pages:
1
Journal:
ao/50/9/ao-50-9-C316.pdf
DOI:
10.1364/AO.50.00C316
File:
PDF, 807 KB
english, 2011
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