Heterodyne grating interferometer based on a...

Applied Optics 2011 Vol. 50; Iss. 9

Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement

Lee, Ju-Yi, Hsieh, Hung-Lin, Lerondel, Gilles, Deturche, Regis, Lu, Mini-Pei, Chen, Jyh-Chen
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Volume:
50
Year:
2011
Language:
english
Journal:
ao/50/9/ao-50-9-1272.pdf
DOI:
10.1364/AO.50.001272
File:
PDF, 880 KB
english, 2011
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