High-speed measurement of three-dimensional surface...

High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique

Jang, Roma, Kang, Chu-Shik, Kim, Jong-Ahn, Kim, Jae Wan, Kim, Jae-Eun, Park, Hae Yong
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Volume:
50
Year:
2011
Language:
english
Journal:
ao/50/11/ao-50-11-1541.pdf
DOI:
10.1364/AO.50.001541
File:
PDF, 757 KB
english, 2011
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