Optical properties and residual stress in aluminum nitride films prepared by alternating-current dual reactive magnetron sputtering
Tang, Chien-Jen, Jaing, Cheng-Chung, Lee, Kun-Hsien, Lee, Cheng-ChungVolume:
50
Year:
2011
Language:
english
Journal:
ao/50/13/ao-50-13-1945.pdf
DOI:
10.1364/AO.50.001945
File:
PDF, 587 KB
english, 2011