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Resolution and stability analysis of localized surface plasmon lithography on the geometrical parameters of soft mold
Zhang, Yukun, Du, Jinglei, Wei, Xingzhan, Shi, Lifang, Deng, Qiling, Dong, Xiaochun, Du, ChunleiVolume:
50
Year:
2011
Language:
english
Journal:
ao/50/13/ao-50-13-1963.pdf
DOI:
10.1364/AO.50.001963
File:
PDF, 509 KB
english, 2011