Maskless fabrication of three-dimensional microstructures with high isotropic resolution: practical and theoretical considerations
Hur, Jun-GyuVolume:
50
Year:
2011
Language:
english
Journal:
ao/50/16/ao-50-16-2383.pdf
DOI:
10.1364/AO.50.002383
File:
PDF, 944 KB
english, 2011