Optimal 3D phase-shifting masks in partially coherent illumination
Ma, Xu, Arce, Gonzalo R., Li, YanqiuVolume:
50
Year:
2011
Language:
english
Journal:
ao/50/28/ao-50-28-5567.pdf
DOI:
10.1364/AO.50.005567
File:
PDF, 471 KB
english, 2011