Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure
Yu, Yuh-Yan, Chang, Chin-Kai, Lai, Ming-Wei, Huang, Long-Sun, Lee, Chih-KungVolume:
50
Year:
2011
Language:
english
Journal:
ao/50/34/ao-50-34-6384.pdf
DOI:
10.1364/AO.50.006384
File:
PDF, 581 KB
english, 2011