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Infrared Spectroscopic Characterization of Silicon Nitride Films—Optical Dispersion Induced Frequency Shifts
Knolle, W. R., Allara, D. L.Volume:
40
Year:
1986
Language:
english
Pages:
4
Journal:
as/40/7/as-40-7-1046.pdf
DOI:
10.1366/0003702864507855
File:
PDF, 448 KB
english, 1986