Sampling, Excitation, and Ionization Characteristics of a...

Sampling, Excitation, and Ionization Characteristics of a Planar Magnetron Glow-Discharge Device

McCaig, Lori, Shi, Zhan, Woodrum, Teresa Holbrook, Brewer, Stephen, Sacks, Richard
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Volume:
46
Year:
1992
Language:
english
Pages:
7
Journal:
as/46/12/as-46-12-1762.pdf
DOI:
10.1366/0003702924123593
File:
PDF, 891 KB
english, 1992
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