Aluminum, Titanium Boride, and Nitride Films...

Applied Spectroscopy 1993 Vol. 47; Iss. 1

Aluminum, Titanium Boride, and Nitride Films Sputter-Deposited from Multicomponent Alloy Targets Studied by XPS

Onyiriuka, Emmanuel C.
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Volume:
47
Year:
1993
Language:
english
Pages:
3
Journal:
as/47/1/as-47-1-35.pdf
DOI:
10.1366/0003702934048488
File:
PDF, 272 KB
english, 1993
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