Polymer Film Thickness Determination with a High-Precision...

Applied Spectroscopy 1996 Vol. 50; Iss. 1

Polymer Film Thickness Determination with a High-Precision Scanning Reflectometer

Shelley, Paul H., Booksh, Karl S., Burgess, Lloyd W., Kowalski, Bruce R.
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Volume:
50
Year:
1996
Language:
english
Pages:
7
Journal:
as/50/1/as-50-1-119.pdf
DOI:
10.1366/0003702963906771
File:
PDF, 703 KB
english, 1996
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