Effect of Operating Frequency on Spatial Features of the Inductively Coupled Plasma
Horner, Julie A., Yang, Pengyuan, Hieftje, Gary M.Volume:
54
Year:
2000
Language:
english
Pages:
7
Journal:
as/54/12/as-54-12-1824.pdf
DOI:
10.1366/0003702001948925
File:
PDF, 860 KB
english, 2000