Effect of Operating Frequency on Spatial Features of the...

Effect of Operating Frequency on Spatial Features of the Inductively Coupled Plasma

Horner, Julie A., Yang, Pengyuan, Hieftje, Gary M.
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Volume:
54
Year:
2000
Language:
english
Pages:
7
Journal:
as/54/12/as-54-12-1824.pdf
DOI:
10.1366/0003702001948925
File:
PDF, 860 KB
english, 2000
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