Spectral Sharpening Algorithm for a Polychromatic Reflectometer in the Extreme Ultraviolet
Banyay, M., Juschkin, L.Volume:
64
Year:
2010
Language:
english
Pages:
8
Journal:
as/64/4/as-64-4-401.pdf
DOI:
10.1366/000370210791114176
File:
PDF, 1.68 MB
english, 2010