Readout of super-resolution marks with Ti thin film

Chinese Optics Letters 2003 Vol. 1; Iss. 7

Readout of super-resolution marks with Ti thin film

Jingsong Wei, Yang Wang, Wendong Xu, Zhenrong Sun, Feng Zhang, Fei Zhou, Fuxi Gan
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Volume:
1
Year:
2003
Pages:
3
Journal:
col/1/7/col-1-7-420.pdf
DOI:
10.3788/COL20030107.0420
File:
PDF, 468 KB
2003
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