In-situ end-point detection during ion-beam etching of...

Chinese Optics Letters 2005 Vol. 3; Iss. 2

In-situ end-point detection during ion-beam etching of multilayer dielectric gratings

Hua Lin, Lifeng Li, Lijiang Zeng
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Volume:
3
Year:
2005
Language:
yoruba
Pages:
3
Journal:
col/3/2/col-3-2-63.pdf
DOI:
10.3788/COL20050302.0063
File:
PDF, 197 KB
yoruba, 2005
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