A piezoresistive micro-cantilever for thermal infrared detector
Jintao Liang, Junhua Liu, Xin Li, Changchun ZhuVolume:
4
Year:
2006
Pages:
3
Journal:
col/4/3/col-4-3-128.pdf
DOI:
10.3788/COL20060403.0128
File:
PDF, 218 KB
2006