DC discharge characteristics and fluorine atom yield in...

Chinese Optics Letters 2006 Vol. 4; Iss. 3

DC discharge characteristics and fluorine atom yield in NF3/He

Liping Duo, Shukai Tang, Haijun Yu, Jian Wang, Xiangde Min, Liucheng Li, Yuqi Jin, Bailing Yang, Fengting Sang
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Volume:
4
Year:
2006
Language:
german
Pages:
3
Journal:
col/4/3/col-4-3-170.pdf
DOI:
10.3788/COL20060403.0170
File:
PDF, 213 KB
german, 2006
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