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Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors
Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan ChenVolume:
4
Year:
2006
Language:
english
Pages:
3
Journal:
col/4/9/col-4-9-550.pdf
DOI:
10.3788/COL20060409.0550
File:
PDF, 164 KB
english, 2006