Effects of water vapor in high vacuum chamber on the properties of HfO2 films
Bo Ling, Hongbo He, Jianda ShaoVolume:
5
Year:
2007
Language:
english
Pages:
3
Journal:
col/5/8/col-5-8-487.pdf
DOI:
10.3788/COL20070508.0487
File:
PDF, 206 KB
english, 2007