Optimization designed large-stroke MEMS micromirror for...

Optimization designed large-stroke MEMS micromirror for adaptive optics

Quan Sun, 孙全, Kelly He, Kelly He, Edmond Cretu, Edmond Cretu
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Volume:
8
Year:
2010
Language:
english
Pages:
4
Journal:
col/8/12/col-8-12-1163.pdf
DOI:
10.3788/COL20100812.1163
File:
PDF, 1.02 MB
english, 2010
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